METASTABLE STRUCTURES IN THE INITIAL-STAGES OF SI HOMOEPITAXY

Authors
BOROVSKY B KRUEGER M GANZ E
Citation
B. Borovsky et al., METASTABLE STRUCTURES IN THE INITIAL-STAGES OF SI HOMOEPITAXY, Surface review and letters, 5(5), 1998, pp. 1053-1056
Citations number
13
Categorie Soggetti
Physics, Condensed Matter","Physics, Atomic, Molecular & Chemical","Material Science
Journal title
Surface review and letters → ACNP
ISSN journal
0218625X
Volume
5
Issue
5
Year of publication
1998
Pages
1053 - 1056
Database
ISI
SICI code
0218-625X(1998)5:5<1053:MSITIO>2.0.ZU;2-U
Abstract
We discuss the growth of the first six atoms of an epitaxial Si island on Si(001). The nucleation of a six-atom island is observed to rely o n a conversion between two metastable four-atom structures. These resu lts suggest that metastable configurations play an important role in e pitaxial growth.