EFFECT OF O-2 PLASMA TREATMENT ON THE PROPERTIES OF SIO2 AEROGEL FILM

In the down-scaling trend of ultra large scaled integration, SiO2 aero gel film can be a promising material for intermetal dielectric with in herent low dielectric constant. A TEOS-derived SiO2 aerogel film by sp in-coating and supercritical drying has high porosity and large intern al surface area which contains the chemical species on the internal su rface, such as organic groups, hydroxyl groups, and adsorbed water. An oxygen plasma treatment of SiO2 aerogel film was introduced to contro l the internal surface chemical species for applying to intermetal die lectrics. The chemical bonding state of the internal surface, microstr ucture, and electrical properties of the oxygen plasma treated SiO2 ae rogel film were analyzed, Through the oxygen plasma treatment, the sur face chemical groups were effectively eliminated, Also, with the param eter changes of oxygen plasma treatment such as ICP power and bias vol tage, micro-structural evolution occurred. Decreases in thickness and particle growth were observed. And the improvement of leakage current behavior was also observed after oxygen plasma treatment. (C) 1998 Els evier Science S.A. All rights reserved.