Ultra-wideband distributed photodetectors for operation in the long-wa
velength region are reported. They comprise four vertically coupled wa
veguide-integrated InGaAs metal-semiconductor-metal photodetectors wit
h 0.2 mu m feature size finger electrodes that are periodically arrang
ed along a coplanar strip transmission line. A 3dB bandwidth of 78GHz
at 1.55 mu m was achieved.