A porous-SiC thin-film photodetector with a pn junction structure has
been successfully fabricated on an Si substrate. The developed device
exhibits a high responsivity of 0.4A/W at 25 degrees C for 650nm irrad
iation. In particular, the device has a responsivity of 0.35A/W and a
photo/dark current ratio larger than 100 at 200 degrees C, indicating
its potential capability for high-temperature operation.