FAST, LOW INSERTION-LOSS OPTICAL SWITCH USING LITHOGRAPHICALLY DEFINED ELECTROMAGNETIC MICROACTUATORS AND POLYMERIC PASSIVE ALIGNMENT STRUCTURES

Authors
NORWOOD RA HOLMAN J SHACKLETTE LW EMO S TABATABAIE N GUCKEL H
Citation
Ra. Norwood et al., FAST, LOW INSERTION-LOSS OPTICAL SWITCH USING LITHOGRAPHICALLY DEFINED ELECTROMAGNETIC MICROACTUATORS AND POLYMERIC PASSIVE ALIGNMENT STRUCTURES, Applied physics letters, 73(22), 1998, pp. 3187-3189
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
73
Issue
22
Year of publication
1998
Pages
3187 - 3189
Database
ISI
SICI code
0003-6951(1998)73:22<3187:FLIOSU>2.0.ZU;2-Z
Abstract
A micro-optoelectromechanical switch that combines microactuator techn ology developed via the Lithographie Galvanformung Abformung process w ith lithographically defined polymeric alignment elements is described . The multimode optical switch achieves submillisecond switching times , low insertion loss (<1 dB), low cross talk (<70 dB), low voltage (3 V), and wavelength independence. (C) 1998 American Institute of Physic s. [S0003-6951(98)00848-1].