SEMICONDUCTOR PROCESSING AND MANUFACTURING

Authors
SHAFARMAN WN BASOL BM BRITT JS HALL RB ROCHELEAU RE
Citation
Wn. Shafarman et al., SEMICONDUCTOR PROCESSING AND MANUFACTURING, Progress in photovoltaics, 5(5), 1997, pp. 359-364
Citations number
9
Journal title
Progress in photovoltaics → ACNP
ISSN journal
10627995
Volume
5
Issue
5
Year of publication
1997
Pages
359 - 364
Database
ISI
SICI code
1062-7995(1997)5:5<359:SPAM>2.0.ZU;2-K
Abstract
The viability of semiconductor deposition and treatment processes for manufacturing are assessed and critical issues identified for CdTe, Cu (InGa)Se-2, thin film silicon and amorphous silicon technologies. The focus is on increasing throughput and decreasing costs. Specific issue s include deposition rate, materials utilization, adhesion, uniformity , equipment and process scale-up, compatibility with subsequent proces sing, module performance and environmental concerns. (C) 1997 John Wil ey & Sons, Ltd.