A STUDY OF SINGLE-CRYSTAL ZIRCONIA IMPLANTED WITH PLATINUM IONS

Single crystal samples of (1 0 0) oriented cubic (yttria stabilized zi rconia) (YSZ) were implanted with 105 and 160 keV platinum ions, using a metal vapor vacuum are (MEVVA) high current ion implanter, to nomin al doses of 2 x 10(16) ions/cm(2) and 5 x 10(16) ions/cm(2), respectiv ely, at room temperature (RT), The implanted samples were annealed iso thermally in air ambient at 850 degrees C and 1100 degrees C from 4 to 12 h, Rutherford Backscattering Spectrometry and Channeling (RBS-C) o f 2 MeV He ions has been used to study the depth distribution of latti ce damage and implant, as well as the annealing behavior, X-ray diffra ction (XRD) is employed to analyze the crystallite of implanted platin um. Both as-implanted samples do not show an amorphous phase. The Pt d epth profile was almost unchanged for all samples during annealing at 850 degrees C and 1100 degrees C, For the 160 keV implanted sample no loss of Pt was observed after annealing at 1100 degrees C, XRD results provide evidence for the formation of a monoclinic phase of ZrO2 in t he damage region after 1100 degrees C annealing. For all annealed samp les, Pt (2 0 0) preferred orientation crystallites were observed by XR D, while the Pt (1 1 1) peak was almost not visible for 850 degrees C annealed samples. (C) 1997 Published by Elsevier Science B.V.