SYNTHESIS AND CHARACTERIZATION OF CLUSTER-ASSEMBLED CARBON THIN-FILMS

Nanostructured carbon thin films have been produced by deposition of s upersonic cluster beams. The clusters are generated by a pulsed are cl uster ion source modified in order to achieve high fluxes and stabilit y. Scanning electron microscopy, Raman, and optical spectroscopy show that the films are a low density network of nanometer-size particles. The nature of the films is essentially graphite-like with a large numb er of distorted bonds. The formation of structures based on sp(3) bond ings is not Observed. The use of cluster beam deposition for the synth esis of nanocrystalline thin films is discussed. (C) 1997 American Ins titute of Physics.