CHARACTERIZATION AND IMAGING OF SAW GROOVED TRANSDUCER ACOUSTIC FIELDBY SLAM

Quantitative characterization of the surface acoustic field radiated f orward, backward, and in orthogonal directions by the grooved transduc er, implemented onto a glass substrate, is accomplished by a scanning laser acoustic microscope (SLAM) operating at 31 MHz. The surface acou stic wave (SAW) amplitude is measured as a function of the number of g rooves and the position of the bulk acoustic wave (BAW) transducer. Th e number of the operating grooves efficiently contributing to the SAW response is estimated. Remarkable reflection of the SAW beam between t wo identical gratings is observed.