Plasma-based ion implantation of a two-dimensional target consisting o
f a periodic array of symmetric, 90 degrees, triangular sawteeth is st
udied using a particle-in-cell plasma simulation. The average ion flux
, ion impact angle, ion impact energy and the energy-resolved dose are
computed. When the sheath width is large compared to the tooth size,
the sheath edge becomes planar, the ion flux is nearly uniform and ion
s impact the surface of the target at approximate to 45 degrees. The i
ncident dose is greatest near the convex corner, and least in the conc
ave corner. (C) 1997 Elsevier Science S.A.