SIMULATION OF PLASMA-BASED ION-IMPLANTATION OF A SAWTOOTH TARGET

Plasma-based ion implantation of a two-dimensional target consisting o f a periodic array of symmetric, 90 degrees, triangular sawteeth is st udied using a particle-in-cell plasma simulation. The average ion flux , ion impact angle, ion impact energy and the energy-resolved dose are computed. When the sheath width is large compared to the tooth size, the sheath edge becomes planar, the ion flux is nearly uniform and ion s impact the surface of the target at approximate to 45 degrees. The i ncident dose is greatest near the convex corner, and least in the conc ave corner. (C) 1997 Elsevier Science S.A.