INDUSTRIAL APPLICATIONS OF PLASMA IMMERSION ION-IMPLANTATION

Plasma immersion ion implantation (PI3) is a new hybrid technology usi ng elements of ion implantation as well as plasma nitriding. In additi on, and due to the high energetic ion bombardment, thermal diffusion c an be used to obtain thicker layers than in conventional ion implantat ion. Furthermore, the process can be used in an ion beam enchanced dep osition (IBED) mode to produce various kinds of coatings. This enables the treatment to be adapted to the material structure and state and a lso to the intended service conditions. Furthermore, economic aspects make PI3 an interesting technique for surface modification of a wide r ange of materials. An overview of the worldwide activities in the trea tment of components and the achieved improvements will be given. (C) 1 997 Elsevier Science S.A.