The determination of low-Z elements such as carbon, nitrogen, and oxygen in
atmospheric aerosol particles is of interest in studying environmental pol
lution. Conventional electron probe microanalysis technique has a limitatio
n for the determination of the low-Z elements, mainly because the Be window
in an energy-dispersive X-ray (EDX) detector hinders the detection of char
acteristic X-rays from light elements. The feasibility of low-Z element det
ermination in individual particles using a windowless EDX detector is inves
tigated. To develop a method capable of identifying chemical species of ind
ividual particles, both the matrix and the geometric effects of particles h
ave to be evaluated. X-rays of low-Z elements generated by an electron beam
are so soft that important matrix effects, mostly due to X-ray absorption,
exist even within particles in the micrometer size range. Also, the observ
ed radiation, especially that of light elements, experiences different exte
nts of absorption, depending on the shape and size of the particles. Monte
Carlo calculation is applied to explain the variation of observed X-ray int
ensities according to the geometric and chemical compositional variation of
individual particles, at: different primary electron beam energies. A comp
arison is carried out between simulated and experimental data, collected fo
r standard individual particles with chemical compositions as generally obs
erved in marine and continental aerosols, Despite the many fundamental prob
lematic analytical factors involved in the observation of X-rays from low-Z
elements, the Monte Carlo calculation proves to be quite reliable to evalu
ate those matrix and geometric effects. Practical aspects of the Monte Carl
o calculation for the determination of light elements in individual particl
es are also considered.