Local high current densities in areas around dislocations with a screw comp
onent might be responsible for the observed high leakage currents in GaN-ba
sed electronic devices. Using ballistic electron emission microscopy, threa
ding dislocations with a screw component are found to be accompanied by hig
h current densities and low effective Schottky barrier heights. The electro
nic states responsible for this extremely nonuniform behavior of GaN films
are metastable trap states. The experimental results show that acceptor-and
donor-like charge traps coexist in the vicinity of dislocations with a scr
ew component. (C) 1999 American Institute of Physics. [S0003-6951(99)04616-
1].