Design and fabrication of liquid phase epitaxy system

The design and fabrication of a simple and versatile liquid phase epitaxial (LPE) system has been described. The present LPE system makes use of the h orizontal multi-bin boat and slider arrangement which enables the growth of even multilayered structures. The growth chamber is heated by a single-zon e resistive furnace precisely controlled through a Eurotherm 902P temperatu re programmer and controller. The vacuum manifolds and accessories are set up in such a way as to ensure high vacuum needed for growth experiments. Th e provision is also made to admit high purity gases like hydrogen or nitrog en into the growth chamber. The design has been kept simple without sacrifi cing the versatility and adaptability for novel growth experiments. The typ ical films grown by this LPE system are also presented.