Chemical limit to semiconductor device miniaturization (vol 2, pg 154, 1999)

Authors
Lubomirsky, I Cohen, D
Citation
I. Lubomirsky et D. Cohen, Chemical limit to semiconductor device miniaturization (vol 2, pg 154, 1999), EL SOLID ST, 2(4), 1999, pp. NIL_2-NIL_2
Citations number
1
Categorie Soggetti
Physical Chemistry/Chemical Physics
Journal title
ELECTROCHEMICAL AND SOLID STATE LETTERS
ISSN journal
10990062 → ACNP
Volume
2
Issue
4
Year of publication
1999
Pages
NIL_2 - NIL_2
Database
ISI
SICI code
1099-0062(199904)2:4<NIL_2:CLTSDM>2.0.ZU;2-Z