A versatile sealing process for AlAs layers is presented. This sealing prev
ents the AlAs layers of AlAs/GaAs top distributed Bragg reflectors from fur
ther undesired oxidation during the wet oxidation of the AlAs current const
riction layers in vertical cavity surface emitting lasers. This method has
been successfully applied to protect the etched pillars in top mirrors alth
ough those pillars were plasma dry etched. (C) 1999 The Electrochemical Soc
iety. S1099- 0062( 98) 07- 019- 9. All rights reserved.