Charge-discharge performance of electron-beam-deposited tin oxide thin-film electrodes

Electron-beam-deposited tin oxide films 1 micrometer or less thick were stu died for use as negative electrodes for thin-film lithium-ion rechargeable batteries. The oxide films were prepared at different thicknesses and heat- treatment conditions (temperature and time), and were characterized by X-ra y diffraction analysis, Auger electron spectroscopy, and atomic force micro scopy. The charge/discharge performance of these films, exhibiting capaciti es higher than 300 mAh/g over more than 100 cycles, were found to depend on the heat-treatment temperatures which influence the structure, grain size, and adhesion to the substrate. (C) 1999 The Electrochemical Society. S1099 -0062(98)08-012-2. All rights reserved.