An AlGaN/GaN HFET incorporating a piezoelectrically enhanced two-layer barr
ier structure has been Fabricated and characterised. The gate leakage curre
nt was observed to be suppressed by one order of magnitude, compared to tha
t in a conventional AlGaN/GaN HFET. Breakdown voltages in the piezoelectric
ally enhanced and conventional HFET structures are similar to 100V and have
positive temperature coefficients.