Reshaping of single-crystal silicon microstructures

This paper deals with the reshaping technology for realizing three-dimensio nal (3-D) microstructures through plastic deformation of single-crystal sil icon (SCS) films by applying Joule heating. SCS beams are used for determin ing the behavior of SCS microstructures during reshaping. The reshaped SCS structure has a sharp corner at a point where stress and heat are concentra ted. The plastic deformation caused by flow stress results in permanent 3-D shapes.