Atomic-scale electron beam processing

Authors
Kizuka, T Yanaka, T
Citation
T. Kizuka et T. Yanaka, Atomic-scale electron beam processing, JPN J A P 1, 38(3A), 1999, pp. 1595-1595
Citations number
9
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS → ACNP
Volume
38
Issue
3A
Year of publication
1999
Pages
1595 - 1595
Database
ISI
SICI code
Abstract
Atomic-scale electron beam processing was demonstrated using high-resolutio n transmission electron microscopy. Nanometer-size holes were produced thro ugh magnesium oxide films. The minimum hole size was 0.84 nm and the minimu m distance between the holes was 0.63 nm.