Characterization of Si3N4/SiC nanocomposite by Raman scattering and XPS

We have synthesized Si3N4/SiC nanocomposites using a commercial polymer. Th e formed Si3N4/SiC nanocomposites have been studied using Raman scattering and X-ray photoelectron spectroscopy (WS). The Raman scattering measurement s showed that the formation of SiC started at 1200 degrees C and that the m ain phase was 3C-SiC, The XPS results suggested that the SiC nanoparticles were formed by a chemical reaction of Si provided from Si3N4 with free carb on obtained by pyrolysis of polymer. The XPS results also indicated that re sidual carbon reacted with N-2 to form CNx, which remained as an impurity p hase in the final product. (C) 1999 Elsevier Science S.A. All rights reserv ed.