The co-deposition of deuterium with silicon doped carbon for silicon concen
trations between 0-100 at.% in the temperature range from room temperature
to 1000 K has been investigated. The eroded material from various different
targets was caught on collectors together with the reflected D to build up
the co-deposited layers, which were analysed with MeV ion beam techniques.
The amount of trapped D per re-deposited target atom depends weakly on the
Si concentration. The maximum of about 0.7 D/(Si + C) was found at Si/C ap
proximate to 1. For pure C and pure Si the D concentration is about 0.45 an
d 0.5 D atoms per re-deposited target atom at room temperature, respectivel
y. For increasing deposition temperature the D concentration does not decre
ase significantly until about 600 It. At about 1000 K the D concentration f
or pure carbon layers is still about 30% of the concentration at room tempe
rature. Also, co-deposited layers of stainless steel and of titanium-carbon
mixtures were investigated. (C) 1999 Elsevier Science B.V. All rights rese
rved.