Determination of angle resolved velocity distributions of sputtered tungsten atoms

Authors
Goehlich, A Niemoller, N Dobele, HF
Citation
A. Goehlich et al., Determination of angle resolved velocity distributions of sputtered tungsten atoms, J NUCL MAT, 269, 1999, pp. 501-506
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Nuclear Emgineering
Journal title
JOURNAL OF NUCLEAR MATERIALS
ISSN journal
00223115 → ACNP
Volume
269
Year of publication
1999
Pages
501 - 506
Database
ISI
SICI code
0022-3115(199903)269:<501:DOARVD>2.0.ZU;2-6
Abstract
Angle resolved velocity distributions of tungsten atoms sputtered by bombar dment of argon ions in the energy range between 0.2 and 5 keV are reported. The velocity distribution is determined using Doppler-shifted laser induce d fluorescence spectroscopy (DSLF) in connection with a detection geometry which allows to vary the angle of emission independently of the angle of in cidence. Deviations from the limiting isotropic case (Thompson distribution ) are observed. Experimental velocity distributions are compared with TRIM. SP simulations. (C) 1999 Elsevier Science B.V. All rights reserved.