Hydrogen in diamond-like carbon films

Properties of physical vapor deposited diamond-like carbon films and the mi gration of hydrogen in co-deposited samples were studied. Measurements util izing Rutherford backscattering spectrometry and Doppler-shift-attenuation techniques were used to obtain the average mass density of the films. Distr ibutions of co-deposited hydrogen and deuterium were measured by the nuclea r resonance reaction H-1 (N-15,alpha gamma)C-12, and the elastic recoil det ection technique, respectively. Secondary ion mass spectrometry was also us ed in combination with these two methods. It was observed that in H and CH4 co-deposited DLC films the temperature of H release varied between 950 and 1070 degrees C depending on the H concentration. (C) 1999 Elsevier Science B.V. All rights reserved.