Reflection of ions at a tungsten target was investigated experimentally in
a linear plasma device. The tungsten target plate was set perpendicular to
the magnetic held, and irradiated by hydrogen and helium plasma. The experi
ment measures a current as a function of sheath potential for a fixed angle
. The reflected neutral particles from the target plate are measured by neu
tral-negative charge convertor made of Cu. The experimental results show go
od agreement with the results calculated with TRIM Monte-Carlo simulation c
ode. A possibility to estimate the ion temperature is shown through the she
ath potential dependence of the ion reflection in the low energy range. (C)
1999 Elsevier Science B.V. All rights reserved.