Reflection high-energy electron diffraction oscillations on rotating substrates

Authors
Braun, W Moller, H Johnson, SR Zhang, YH
Citation
W. Braun et al., Reflection high-energy electron diffraction oscillations on rotating substrates, J VAC SCI B, 17(2), 1999, pp. 474-476
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
2
Year of publication
1999
Pages
474 - 476
Database
ISI
SICI code
1071-1023(199903/04)17:2<474:RHEDOO>2.0.ZU;2-X
Abstract
We compare different methods to measure reflection high-energy electron dif fraction oscillations on rotating substrates. The best signal-to-noise rati o as well as the highest accuracy is obtained by measuring the full width a t half maximum of the specular spot perpendicular to the surface. The accur acy of the method is well within 1% and offers a practical way to accuratel y determine growth rates for device fabrication. (C) 1999 American Vacuum S ociety. [S0734-211X(99)04502-3].