Comparative study of electron emission characteristics of silicon tip arrays with and without amorphous diamond coating

Authors
She, JC Huq, SE Chen, J Deng, SZ Xu, NS
Citation
Jc. She et al., Comparative study of electron emission characteristics of silicon tip arrays with and without amorphous diamond coating, J VAC SCI B, 17(2), 1999, pp. 592-595
Citations number
15
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
2
Year of publication
1999
Pages
592 - 595
Database
ISI
SICI code
1071-1023(199903/04)17:2<592:CSOEEC>2.0.ZU;2-6
Abstract
Details are given of experiments carried out to compare the field electron emission characteristics of single crystal silicon lip arrays with and with out amorphous diamond (a-D) coating. The coatings on the tip arrays were pr epared using the filtered vacuum ire plasma deposition technique. In additi on, the optical and electrical properties of the a-D coatings were measured . An: anode probe technique was employed to measure the current-voltage cha racteristics and turn-on fields of the tip-array emitters before and after coating. It is found that the coating enhances the emission. The physical r easons for these effects are discussed. (C) 1999 American Vacuum Society. [ S0734-211X(99)00502-8].