Papers from the Fourth International Plasma-Based Ion Implantation Workshop - 2-4 June 1998 Dearborn, Michigan - Preface

Authors
Mantese, JV Speck, CE
Citation
Jv. Mantese et Ce. Speck, Papers from the Fourth International Plasma-Based Ion Implantation Workshop - 2-4 June 1998 Dearborn, Michigan - Preface, J VAC SCI B, 17(2), 1999, pp. 798-798
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
2
Year of publication
1999
Pages
798 - 798
Database
ISI
SICI code
1071-1023(199903/04)17:2<798:PFTFIP>2.0.ZU;2-A