Plasma immersion (PI3) ion implantation of AISI M2 steel by nitrogen was ca
rried out. The implantation voltage was 40 kV and the doses varied in the r
ange of 2-8 x 10(18) ions/cm(2). It is established that the hardness of ste
el increases up to 25 GPa, the friction coefficient decreases by the factor
of 2 and wear resistance is enhanced by a factor of 10 after PI3. It is ex
plained by the formation of a highly doped face-centered-cubic gamma-Fe(N,C
) phase that is due to local tempering of the steel surface. The total conc
entration of nitrogen and carbon in this;phase is about 40 at. %. (C) 1999
American Vacuum Society. [S0734-211X(99)03102-9].