Plasma immersion ion implantation for improvement of mechanical propertiesof AISI M2 steel

Citation
Vv. Uglov et al., Plasma immersion ion implantation for improvement of mechanical propertiesof AISI M2 steel, J VAC SCI B, 17(2), 1999, pp. 836-839
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
ISSN journal
10711023 → ACNP
Volume
17
Issue
2
Year of publication
1999
Pages
836 - 839
Database
ISI
SICI code
1071-1023(199903/04)17:2<836:PIIIFI>2.0.ZU;2-9
Abstract
Plasma immersion (PI3) ion implantation of AISI M2 steel by nitrogen was ca rried out. The implantation voltage was 40 kV and the doses varied in the r ange of 2-8 x 10(18) ions/cm(2). It is established that the hardness of ste el increases up to 25 GPa, the friction coefficient decreases by the factor of 2 and wear resistance is enhanced by a factor of 10 after PI3. It is ex plained by the formation of a highly doped face-centered-cubic gamma-Fe(N,C ) phase that is due to local tempering of the steel surface. The total conc entration of nitrogen and carbon in this;phase is about 40 at. %. (C) 1999 American Vacuum Society. [S0734-211X(99)03102-9].