Microfabrication by use of a spatial light modulator in the ultraviolet: experimental results

We report the development of a new microstereophotolithography technique fo r creation of three-dimensional microcomponents by use of a planar, layer-b y-layer process of exposure, in which a spatial light modulator is used as a dynamic lithographic mask. The system operates in the UV to take advantag e of the wide supply of commercially available photopolymers designed for c onventional stereolithography. With this novel procedure it is possible to build components with feature sizes as small as a few micrometers. The expe rimental setup is briefly described, and the first microcomponent fabricate d by this system is shown. (C) 1999 Optical Society of America.