Measurements by optical and mass spectrometry of the density of active species in the flowing afterglow of a N-2/(10(-4)-10(-3))CH4 plasma

Citation
Am. Diamy et al., Measurements by optical and mass spectrometry of the density of active species in the flowing afterglow of a N-2/(10(-4)-10(-3))CH4 plasma, SURF COAT, 112(1-3), 1999, pp. 38-42
Citations number
10
Categorie Soggetti
Material Science & Engineering
Journal title
SURFACE & COATINGS TECHNOLOGY
ISSN journal
02578972 → ACNP
Volume
112
Issue
1-3
Year of publication
1999
Pages
38 - 42
Database
ISI
SICI code
0257-8972(199902)112:1-3<38:MBOAMS>2.0.ZU;2-K
Abstract
The influence of small quantities of methane on the behaviour of the active species N, N-2(A) and N-2(+) (B) has been studied by emission and mass spe ctrometry. The nitrogen atom concentration [N] is in the (0.1-4) x 10(15) p articles cm(-3) range under the emission and mass spectrometry. The nitroge n atom concentration [N] is in the (0.1-4)x 1015 particles cm(-3) range und er the experimental conditions investigated. For a N-2-0.01%CH4 mixture, [N ] is twice as high as for pure N-2. The metastable N-2(A) concentration is approximately 10(11) particles cm(-3), i.e it varies from 3 to 6 times lowe r than in pure N, as the pressure decreases from 25 to 12.5 mbar, and the e xcited ion density [N-2(+)(B)], is 5 x 10(4)-2 x 10(6) particles cm(-3), i. e. 100-1000 times lower than in pure N-2. (C) 1999 Elsevier Science S.A. Al l rights reserved.