Surface cleaning by plasma-enhanced desorption of contaminants (PEDC)

Low-pressure plasma processes were applied for cleaning the surface of glas s, metals, carbon and polymers from contaminants such as air pollutants, fi ngerprints, coupling agents, oxide layers, weakly bonded surface layers, sl ip agents, light stabilizer or additive enrichments at the surface. It is p ossible to remove contaminations by simple plasma sputtering (particle bomb ardment) in plasmas of noble gases, by oxidation of organic contaminants wi th oxygen plasma or reduction of oxides or sulphides by hydrogen plasma. Ex amples were mentioned for purification of glass or glass fibre surface and the consequences for optical properties or adhesion in polymer-fibre compos ites. Degreasing of oil-contaminated sheet metals and removal of weakly bon ded oxides were performed by plasma cleaning. The consequences of surface c ontamination of polymers in gluing and metallization are demonstrated. (C) 1999 Elsevier Science S.A. All rights reserved.