A MINIATURE, ALL-ELECTROSTATIC, FIELD-EMISSION ELECTRON COLUMN FOR SURFACE ANALYTICAL MICROSCOPY

Authors
ROBERTS RH ELGOMATI MM KUDJOE J BARKSHIRE IR BEAN SJ PRUTTON M
Citation
Rh. Roberts et al., A MINIATURE, ALL-ELECTROSTATIC, FIELD-EMISSION ELECTRON COLUMN FOR SURFACE ANALYTICAL MICROSCOPY, Measurement science & technology, 8(5), 1997, pp. 536-545
Citations number
21
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
8
Issue
5
Year of publication
1997
Pages
536 - 545
Database
ISI
SICI code
0957-0233(1997)8:5<536:AMAFEC>2.0.ZU;2-H
Abstract
The design, construction and application of a miniature, electrostatic , two-lens field emission column are presented and demonstrated. The c olumn can provide a finely focused beam of electrons with energies ran ging from 100 eV to 15 keV, with corresponding beam currents of 5-20 n A, onto a sample at a working distance of 10 mm. Edge resolution measu rements show that the beam diameter at the sample is (at worst) 0.6 mu m at 200 eV falling to 120 nm at 5 keV.