Citation
Ci. Butoi et al., Control of surface film composition and orientation with downstream PECVD of hexafluoropropylene oxide, CHEM MATER, 11(4), 1999, pp. 862
Citations number
17
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
CHEMISTRY OF MATERIALS
ISSN journal
08974756
→ ACNP
Volume
11
Issue
4
Year of publication
1999
Database
ISI
SICI code
0897-4756(199904)11:4<862:COSFCA>2.0.ZU;2-U
Abstract
Highly oriented fluorocarbon films are deposited downstream from an inducti
vely coupled rf plasma using hexafluoropropylene oxide (HFPO). Angle-depend
ent XPS results [takeoff angles of 0 degrees (upper) and 80 degrees (lower)
] demonstrate that the films comprise CF2 chains terminated by CF3 groups a
t the outer surface of the film. NEXAFS data establishes that the CF2 group
s are aligned in chains which are oriented normal to the substrate.