Citation
Gdj. Su et al., Optical scanners realized by surface-micromachined vertical torsion mirror, IEEE PHOTON, 11(5), 1999, pp. 587-589
Citations number
14
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
IEEE PHOTONICS TECHNOLOGY LETTERS
ISSN journal
10411135
→ ACNP
Volume
11
Issue
5
Year of publication
1999
Pages
587 - 589
Database
ISI
SICI code
1041-1135(199905)11:5<587:OSRBSV>2.0.ZU;2-X
Abstract
We report on a novel vertical torsion mirror fabricated by surface-micromac
hining for optical scanner applications. Driven by an electrostatic actuato
r, the scanning mirror has a resonant frequency of 0.5 kHz and an optical s
can range of 26 degrees. The maximum achievable number of resolvable spots
for this 300 mu m x 250 mu m scanner is 238.