Survey of sampling techniques for solids suitable for microanalysis by total-reflection X-ray fluorescence spectrometry

A survey of solid sampling techniques is given, suitable for microanalysis or even ultramicroanalysis by total-reflection X-ray fluorescence (TXRF). A sample amount of 1 ng to 100 mu g is placed on a clean, flat carrier usual ly made of quartz glass or Plexiglas(R). For quantification, a drop is adde d to the sample with a known amount of a single element serving as internal standard. Solid samples can be applied as small particles, fine powders, t hin sections or deposits. Several techniques of solid sampling have been ex amined and one example of each technique is given demonstrating its suitabi lity: direct placing of individual particles, suspension of powdered materi als, collection of air dust by impaction, the touchstone technique for meta ls, laser ablation for local analysis, the Q-tip technique for paints and i nks, freeze-cutting of organic materials and direct contamination control o f wafers.