Ion energy distributions in inductively coupled radio-frequency dischargesin argon, nitrogen, oxygen, chlorine, and their mixtures

We report ion energy distributions, relative ion intensities, and absolute total ion current densities at the grounded electrode of an inductively cou pled Gaseous Electronics Conference radio-frequency reference cell for disc harges generated in pure argon, nitrogen, oxygen, and chlorine, and in mixt ures of argon with N-2,O-2, and Cl-2. Measured current densities are signif icantly greater for pure argon and for mixtures containing argon than for p ure N-2,O-2, and Cl-2. For all three molecular gases, the ratio of molecula r ions to the fragment ions decreases when argon is added to the molecular gas discharges. A possible destruction mechanism for the molecular ions inv olving metastable argon is discussed. (C) 1999 American Institute of Physic s. [S0021-8979(99)00309-6].