The dislocation distribution and emission profile of sublimation lateral ov
ergrowth GaN and metalorganic chemical vapor deposition films have been stu
died using transmission electron microscopy and cathodoluminescence. A clos
e relationship between the emission profile and the dislocation distributio
n has been observed. The results show that the dislocations not only affect
the band edge emission, but also the yellow emission. It is observed that
the dislocations propagate laterally in the overgrowth region. The mechanis
m of the change in the propagation direction of dislocations has been discu
ssed. (C) 1999 American Institute of Physics. [S0021-8979(99)06309-4].