The dependence of ferroelectric properties of sol-gel derived BaTiO3 thin (
0.35 mu m) films on various Si substrates was investigated. It was found th
at only films deposited on p(+) Si (10(20) cm(-3) B, 2% Ge) are (110) orien
ted and possess a few percent of the spontaneous polarization of single-cry
stal BaTiO3. The direction of polarization self restored after being revers
ed by external bias or heated above the Curie temperature. It was found tha
t the pyroelectric coefficient was not zero above the Curie point, which in
dicated that the films are permanently subjected to an electric field, whic
h originates from the contact potential between the film and the substrate.
This conclusion was confirmed by surface photovoltage spectroscopy. Orient
ation of the films was attributed to the presence of Ge in the substrate, w
hich decreased lattice mismatch between the (100) vector of the Si substrat
e and (110) vector of BaTiO3. The possibility of a paraelectric to ferroele
ctric transition driven by an electric field due to the contact potential d
ifference must be taken into account for dynamic random access memory appli
cations. (C) 1999 American Institute of Physics. [S0021-8979(99)00708-2].