Proton irradiation with subsequent rapid thermal annealing was used to inve
stigate intermixing of InGaAs/GaAs and InGaAs/AlGaAs quantum wells. Large p
hotoluminescence (PL) energy shifts were observed in both materials. Compar
atively, InGaAs/AlGaAs samples showed larger PL energy shifts than InGaAs/G
aAs samples because of the presence of Al in the barriers and also better r
ecovery of PL intensities, which is mainly due to dynamic annealing effects
in AlGaAs during irradiation. Based on this, InGaAs/AlGaAs quantum-well la
sers were fabricated and up to 49.3-nm-emission wavelength shift was observ
ed in the proton-irradiated laser with no significant degradation in device
characteristics. (C) 1999 American Institute of Physics. [S0021-8979(99)09
609-7].