The effect of oxygen on magnetic properties and corrosion resistance of Fe-N thin films

The effect of oxygen and heat treatment on magnetic properties and corrosio n resistance of Fe-N thin films sputter-deposited under various N-2+O-2 par tial pressure were investigated. All the as sputtered films have a single p hase of alpha-Fe only, except where a high N-2+O-2 partial pressure was use d. After annealing at 200-500 degrees C, the structure and magnetic propert ies of Fe-N-O films were changed. Under suitable conditions the magnetic pr operties of Fe-N-O films were found to have H-c of 0.5 Oe and 4 pi M-s arou nd 20 kG. It is also demonstrated that the oxygen has improved the corrosio n resistance and thermal stability of Fe-N thin film. (C) 1999 American Ins titute of Physics. [S0021-8979(99)24508-2].