We analyzed the permeability measurement error of a low permeance thin film
. We clarified that the noise voltage was excited by a current loop which i
s composed of the coaxial cable and the ground plane. The current loop shou
ld be removed for high sensitivity of the permeameter. The permeability of
a high electrical resistivity film (CoFeHfO) has been demonstrated 1 MHz-3.
5 GHz. (C) 1999 American Institute of Physics. [S0021-8979(99)78908-5].