A novel method is used for pinning the magnetization of the magnetically ha
rd subsystem in micron-size magnetic tunnel junctions: the so-called artifi
cial antiferromagnetic structure. The latter uses the strong antiparallel e
xchange coupling between two Co layers through a Ru spacer layer to ensure
a high rigidity of the hard subsystem magnetization. The tunnel barriers we
re formed by sputter etching previously deposited Al layers in a rf Ar/O-2
plasma. Wafers, 3 in. in diameter, were patterned into arrays of square jun
ctions with lateral sizes of 20 and 50 mu m. All junctions of a given size
show resistances reproducible within several percents. The tunnel magnetore
sistance (TMR) is found to be independent of the junction size and TMR rati
os of 14%-16% are achieved at room temperature. (C) 1999 American Institute
of Physics. [S0021-8979(99)49508-8].