Photoluminescence (PL) was used as an in situ method for studying the elect
rodeposition of copper on p-GaAs. During electrodeposition, PL of GaAs deca
yed due to growth of the metallic layer and the PL signal was sensitive to
a fraction of a monolayer of copper. Recovery of the initial PL intensity w
as observed after anodic stripping of the copper deposit. A quantitative em
pirical relationship was established between the PL decrease and the amount
of deposited copper, Variation in PL intensity is mainly due to modificati
on of the optical properties of the interface rather than to a change in se
miconductor band bending. PL can be a convenient method for monitoring meta
l electrodeposition on other semiconductors too. (C) 1999 The Electrochemic
al Society. S0013-4651(98)06-037-6. All rights reserved.