Cross-polymerization in alkylsilane self-assembled monolayers (SAMs) has be
en thought to be an essential ingredient of their stability. For alkylsilan
e SAMS at full coverage, it is shown here that cross-polymerization cannot
occur due to steric effects. Thus, to form dense, fully covered monolayers,
cross-polymerization must be avoided. Such monolayers should be as stable
as alkanethiol SAMs, which also do not cross-polymerize. The structure of t
he headgroup plays a limiting role in possible monolayer structures. Due to
large steric hindrances, the dimethylmonochlorosilanes cannot cover a sili
ca surface with a density equal to the density of surface hydroxyls. In con
trast, the trichlorosilanes can achieve such densities. To satisfy the ster
ic constraints, the aliphatic tails must form a herringbone structure.