S. Cho et al., Metalorganic vapor phase epitaxy growth and properties of GaAs/AlGaAs and InGaAs/GaAs quantum well structures on (111)A GaAs substrates, MICROELEC J, 30(4-5), 1999, pp. 455-459
We review the recent advances in the fabrication and properties of GaAs/AlG
aAs and InGaAs/GaAs quantum well (QW) structures grown on (111)A GaAs subst
rates by atmospheric pressure metalorganic vapor phase epitaxy (MOVPE). We
show that a 25-period GaAs/AlGaAs multi-QW (MQW) structure was fabricated w
ith good crystal quality, high photoluminescence (PL) emission intensity an
d monolayer (ML) interfacial roughness. A PL full width at half maximum (FW
HM) of 10.5 meV was achieved for a 25-period MQW with a well width of 44 An
gstrom. This is the narrowest linewidth reported to date for any similar st
ructures grown on (111)A or B substrates by any growth technique. We also r
eport the properties of an InGaAs/GaAs single quantum well structure grown
on (111)A GaAs. For this structure, the PL FWHM value was 9.1 meV, correspo
nding to a 1 ML interfacial roughness for a well width of 41 Angstrom. This
is the first demonstration of an InGaAs/GaAs quantum well structure grown
on (111)A or (111)B GaAs by MOVPE. (C) 1999 Elsevier Science Ltd. All right
s reserved.