Short-focus silicon parabolic lenses for hard X-rays

Authors
Aristov, VV Starkov, VV Shabel'nikov, LG Kuznetsov, SM Ushakova, AP Grigoriev, MV Tseitlin, VM
Citation
Vv. Aristov et al., Short-focus silicon parabolic lenses for hard X-rays, OPT COMMUN, 161(4-6), 1999, pp. 203-208
Citations number
12
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Optics & Acoustics
Journal title
OPTICS COMMUNICATIONS
ISSN journal
00304018 → ACNP
Volume
161
Issue
4-6
Year of publication
1999
Pages
203 - 208
Database
ISI
SICI code
0030-4018(19990315)161:4-6<203:SSPLFH>2.0.ZU;2-5
Abstract
Parabolic lenses have been formed by photoanodic etching of silicon in the form of profiles 22 mu m deep and 5 mu m in diameter. Observations with 17. 46 keV radiation show that the focal length of the lenses is 7 cm and image s with resolution of 3 mu m have been obtained. A procedure to evaluate the quality of real refracting profiles is suggested. (C) 1999 Elsevier Scienc e B.V. All rights reserved.