Characterization and modeling of a CMOS-compatible MEMS technology

Authors
Latorre, L Nouet, P Bertrand, Y Hazard, P Pressecq, F
Citation
L. Latorre et al., Characterization and modeling of a CMOS-compatible MEMS technology, SENS ACTU-A, 74(1-3), 1999, pp. 143-147
Citations number
6
Categorie Soggetti
Instrumentation & Measurement
Journal title
SENSORS AND ACTUATORS A-PHYSICAL
ISSN journal
09244247 → ACNP
Volume
74
Issue
1-3
Year of publication
1999
Pages
143 - 147
Database
ISI
SICI code
0924-4247(19990420)74:1-3<143:CAMOAC>2.0.ZU;2-M
Abstract
In this paper we present a new methodology for efficient electromechanical characterization of a CMOS-compatible micro-electro mechanical sensors (MEM S) technology. Using an original test structure, the so-called 'U-shape can tilever beam', we are able to determine all mechanical characteristics of f orce sensors constituted with elementary beams in a given technology. A com plete set of electromechanical relations that can be used for the design of Microsystems have been also developed. (C) 1999 Elsevier Science B.V. All rights reserved.