A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

We studied the behaviour of the cylindrical magnetron discharge in argon an d xenon. We concentrated ourselves mainly on description of the transport o f charge carriers in the region from the negative glow to the anode. We att empted to describe this transport using Monte-Carlo simulations as well as by standard transport parameters, mobility and diffusion coefficients. We a lso experimentally determined the radial shape of the electron energy distr ibution function (EEDF) including its detectable anisotropy caused by the p resence of magnetic field. For the EEDF determination we used the planar pr obe whose collecting surface was adjustable at different angles to the dire ction of the magnetic held as well as movable in radial direction. The resu lts of modelling and experiment are discussed.