All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining

Bulk silicon micromachining is used to fabricate bistable optical fiber swi tches, The switches are based on a silicon device consisting of an actuator for fiber movement and a V-groove fiber clamp for bistable operation. The complete mechanical structures including thermal actuators are etched into standard [100] silicon wafers using anisotropic wet etching in KOH, While s witching is caused by asymmetric thermal expansion of a U-shaped silicon ca ntilever, the fiber clamp is driven by the bimaterial effect. The efficient process technology allows a low cost batch fabrication of these devices. T he switches exhibit an insertion loss <1 dB and a crosstalk of < -60 dB usi ng standard single-mode fibers, A switching power below 1 W is required dur ing switching.